Introductory MEMS : Fabrication and Applications
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on ME...
Shranjeno v:
| Auteurs principaux: | , |
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| Format: | Livre numérique |
| Jezik: | Anglais |
| Izdano: |
New York, NY :
Springer US
2010.
Cham : Springer Nature |
| Online dostop: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Sporočilo: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Introductory MEMS, Texte imprimé, 9780387560588 • Introductory MEMS, Texte imprimé, 9781489984210 |
| LEADER | 03212nam a22003257a 4500 | ||
|---|---|---|---|
| 001 | 1403773 | ||
| 008 | 110106s2010 xx ||| |||| 00| 0 eng d | ||
| 009 | PPN149075480 | ||
| 020 | |a 9780387095110 | ||
| 041 | 0 | |a eng | |
| 082 | |a 621.381 | ||
| 100 | 1 | |a Adams, Thomas M. | |
| 245 | 1 | 0 | |a Introductory MEMS : |b Fabrication and Applications |c by Thomas M. Adams, Richard A. Layton. |
| 260 | |a New York, NY : |b Springer US. | ||
| 260 | |a Cham : |b Springer Nature, |c 2010. | ||
| 500 | |a Archives Springer e-books (Licence nationale) | ||
| 500 | |a Archives Springer e-books (Licence nationale) | ||
| 505 | 0 | |a Fabrication -- The substrate and adding material to it -- Creating and transferring patterns#x2014;Photolithography -- Creating structures#x2014;Micromachining -- Solid mechanics -- Applications -- Thinking about modeling -- MEMS transducers#x2014;An overview of how they work -- Piezoresistive transducers -- Capacitive transducers -- Piezoelectric transducers -- Thermal transducers -- to microfluidics -- Laboratories -- Microfabrication laboratories. | |
| 506 | |a Accès en ligne pour les établissements français bénéficiaires des licences nationales | ||
| 506 | |a Accès soumis à abonnement pour tout autre établissement | ||
| 506 | |a Conditions particulières de réutilisation pour les bénéficiaires des licences nationales. https://www.licencesnationales.fr/springer-nature-ebooks-contrat-licence-ln-2017 | ||
| 520 | |a Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines. . | ||
| 700 | 1 | |a Layton, Richard A. |4 aut | |
| 776 | 0 | |t Introductory MEMS |b Texte imprimé |z 9780387560588 | |
| 776 | 0 | |t Introductory MEMS |b Texte imprimé |z 9781489984210 | |
| 856 | 4 | |u https://doi.org/10.1007/978-0-387-09511-0 |z Accès sur la plateforme de l'éditeur | |
| 856 | 4 | |q PDF |u https://revue-sommaire.istex.fr/ark:/67375/8Q1-J1T637T5-5 |z Accès sur la plateforme Istex | |
| 856 | 4 | |5 452349901:876780575 |u https://ezproxy.univ-orleans.fr/login?url=https://doi.org/10.1007/978-0-387-09511-0 |z Accès Université d'Orléans | |
| 856 | 4 | |5 180339901:87678385X |u uhttps://ezproxy.insa-cvl.fr/login?qurl=https://doi.org/10.1007/978-0-387-09511-0 |z Accès INSA CVL | |
| 997 | |0 1403773 |1 Livre numérique |a Ressource numérique |b INSA |b ENSA |c 0/Bibliothèque numérique/ |c 1/Bibliothèque numérique/Autre ressource numérique/ | ||